Development and application of semiconductor quantitative glue pump technology
2026-05-27 21:11:32 544With the rapid development of the semiconductor, new energy, and precision electronics manufacturing industries, the importance of high-precision fluid delivery equipment is increasingly prominent. Among them, the metering glue pump, as a core device in chip packaging, dispensing, micro-delivery, and precision coating processes, has a significant impact on product yield and production stability. In recent years, the emergence of a new type of frictionless metering glue pump has provided a new technical direction for high-cleanliness, high-precision fluid delivery.
This metering glue pump is mainly composed of a bracket, a shaft sleeve, a cavity, an elastic connecting sleeve, and a horizontal linear drive mechanism. The horizontal linear drive mechanism drives the shaft sleeve to move, causing the elastic connecting sleeve to expand and contract horizontally, thereby changing the internal volume of the cavity to achieve liquid suction and metered glue injection. Compared with traditional plunger pumps, gear pumps, or peristaltic pumps, the most notable feature of this structure is that its internal cavity has no mechanical friction contact, avoiding the problem of particle contamination caused by friction during long-term operation of traditional pumps. In the semiconductor manufacturing process, the conveyed media often include photoresist, electronic chemicals, encapsulation adhesives, and high-purity reagents, which require extremely high cleanliness. Traditional pumps are prone to affecting liquid purity due to seal wear, mechanical contact, or particle shedding during operation, thereby impacting chip manufacturing quality. The frictionless metering glue pump achieves fluid delivery through elastic deformation, significantly reducing the risk of particle contamination, making it more suitable for high-end semiconductor and precision electronics industries.
In addition, this metering glue pump also offers advantages such as high metering accuracy, stable flow control, compact structure, and low maintenance requirements. By integrating a servo drive system and intelligent control algorithms, it achieve micro-liter-level or even higher precision fluid control, meeting the demands of advanced processes such as advanced packaging, Mini LED, Micro LED, and new energy battery coating. As the semiconductor industry continues to develop toward higher integration and precision, the market demand for high-cleanliness, high-stability fluid delivery equipment will also continue to grow. In the future, frictionless, low-contamination, intelligent metering glue pumps will demonstrate broader application prospects in the semiconductor, medical, biopharmaceutical, and high-end electronics manufacturing fields.
Jiangsu Haifa Machinery Manufacturing Co., Ltd. was restructured from Jiangsu Ligong Group Co., Ltd. Jingjiang Stainless Steel Pump Valve Factory, affiliated with the Iron and Steel Research Institute of the Ministry of Metallurgical Industry, established in 1958. The company mainly produces API610 chemical process pumps - OH1 pumps, OH2 pumps, OH3 pumps, OH4 pumps, BB1 pumps, BB2 pumps, BB3, BB4, BB5 multistage pumps, VS1, VS4, VS5, VS6 barrel pumps, HES-type chemical process pumps, chemical pumps, petrochemical pumps, sixth-generation ultra-low carbon stainless steel high-quality leak-free molten urea pumps, urea hydrolyzer feed pumps, high-temperature asphalt pumps, pitot tube pumps, rotary jet pumps, molten salt pumps, vertical submerged pumps, magnetic drive pumps, low-temperature liquid hydrogen pumps, high-pressure liquid hydrogen pumps, high-temperature nitric acid magnetic drive pumps, magnetic drive pumps for conveying solid-containing media, industrial pumps, canned motor pumps, slurry pumps, titanium tetrachloride pumps, self-priming pumps, lined fluorine pumps, lined fluorine clamp pumps, leak-free pumps, desulfurization and denitrification pumps, alkali pumps, pumps, geothermal pumps, oil pumps, axial flow pumps, printing and dyeing pumps, dyeing and finishing pumps, Ti alloy pumps, C-276 material, Hastelloy, 316L, forced circulation pumps, fourth-generation nuclear pumps, nuclear island pumps, special pumps for filter presses, refrigerant pumps, long-shaft vertical submerged pumps, CQC first-level energy efficiency chemical pumps, high-pressure descaling industrial pumps, and Chinese chemical pumps. gaoshengexpo.com Tel: 13905263417 E-mail: jslgpump@gmail.com E-mail: jsareva@163.com
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Jiangsu Haifa Machinery Manufacturing Co., Ltd.
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