Key application of chemical pumps in AOI chip manufacturing
2026-05-27 21:21:33 125Currently, the world's top-tier chips are rapidly evolving towards high computing power, high integration, and low power consumption. In the AI computing power, NVIDIA's Blackwell platform serves as a representative, while in the server CPU domain, AMD's EPYC series takes the lead, and in high-end mobile phone chips, Apple's A-series chips set the industry benchmark. In the manufacturing process of these advanced chips, in addition to lithography machines, etching machines, and packaging equipment, chemical pumps are equally indispensable core equipment.
Chip manufacturing is a highly precise process involving hundreds of process steps such as lithography, etching, thin-film deposition, CMP (chemical mechanical polishing), cleaning, and packaging. these processes, large quantities of high-purity acids, alkalis, organic solvents, ultrapure water (UPW), and electronic chemicals need to be transported. Chemical pumps are responsible for the stable delivery and circulation of these media, and their operational stability directly affects chip yield and production safety.
In lithography and etching processes, chemical pumps need to transport highly corrosive liquids such as sulfuric acid, hydrofluoric acid, and developer solutions. Therefore, the pump bodies are typically made of high-cleanliness, corrosion-resistant materials like PFA, PVDF, and PTFE to avoid metal ion contamination. To meet the cleanliness requirements of advanced manufacturing processes, many semiconductor processes adopt leak-free magnetic drive pumps or diaphragm pumps to reduce particle contamination and liquid leakage risks. In CMP polishing processes, chemical pumps need to transport polishing slurries containing nano-scale particles, requiring extremely high wear resistance, flow stability, and pulsation control capabilities. In cleaning equipment, chemical pumps are responsible for the circulation and delivery of ultrapure water, maintaining stable flow, temperature, and pressure to ensure the cleanliness of wafer surfaces.
Additionally, in the data centers and cooling of chip manufacturing plants, high-efficiency circulation pumps also play a crucial role in transporting cooling liquids. As the power consumption of AI chips continues to rise, liquid cooling technology is rapidly developing, and the demand for highly reliable, high-efficiency cooling pumps is steadily increasing. In the future, as advanced manufacturing processes such as 2nm and 1nm continue to advance, chip manufacturing will impose higher requirements on the cleanliness, corrosion resistance, stability, intelligent control capabilities of chemical pumps. High-end chemical pumps will play an increasingly important role in the global semiconductor industry chain.
Jiangsu Haifa Machinery Manufacturing Co., Ltd. was restructured from the Jingjiang Stainless Steel Pump Valve Factory of the Iron and Steel Research Institute of the Ministry of Metallurgical Industry, Jiangsu Ligong Group Co., Ltd., which was established in 1958. The company mainly produces API610 chemical process pumps - OH1 pumps, OH2 pumps, OH3 pumps, OH4 pumps, BB1 pumps, BB2 pumps, BB3, BB4, BB5 multi-stage pumps, VS1, VS4, VS5, VS6 barrel-type pumps, HES-type chemical process pumps, chemical pumps, petrochemical pumps, sixth-generation ultra-low carbon stainless steel high-quality leak-free molten urea pumps, urea hydrolyzer feed pumps, high-temperature asphalt pumps,ot tube pumps, rotary jet pumps, molten salt pumps, vertical submerged pumps, magnetic drive pumps, low-temperature liquid hydrogen pumps, high-pressure liquid hydrogen pumps, high-temperature nitric acid magnetic drive pumps, magnetic drive pumps for conveying solid-containing media, industrial pumps, canned motor pumps, slurry pumps, titanium tetrachloride pumps, strong self-priming pumps, fluoroplastic-lined pumps, sandwich-lined fluoroplastic pumps, leak-free pumps, desulfurization and denitrification pumps, alkali pumps, pumps, geothermal pumps, oil pumps, axial flow pumps, printing and dyeing pumps, dyeing and finishing pumps, Ti alloy pumps, C-276 material, Hastelloy, 316L, forced circulation pumps, fourth-generation nuclear power pumps, nuclear island pumps, specialized pumps for filter presses, refrigerant pumps, long-shaft vertical submerged pumps, CQC first-level energy efficiency chemical pumps, high-pressure descaling industrial pumps, and Chinese chemical pumps..gaoshengexpo.com Tel: 13905263417 E-mail: jslgpump@gmail.com E-mail: jsareva@163.com
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Jiangsu Haifa Machinery Manufacturing Co., Ltd.
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